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Reduced Thermal Processing for ULSI
Language: en
Pages: 450
Authors: R.A. Levy
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices. Furthermore, due to the relatively low melting point of the first aluminum metallization level, such restrictions extend to the fabrication of multilevel structures that are
Reduced Thermal Processing for ULSI
Language: en
Pages: 456
Authors: R a Levy
Categories: Science
Type: BOOK - Published: 1990-01-31 - Publisher:

Books about Reduced Thermal Processing for ULSI
Process and Device Simulation for MOS-VLSI Circuits
Language: en
Pages: 636
Authors: P. Antognetti, D.A. Antoniadis, Robert W. Dutton, W.G. Oldham
Categories: Technology & Engineering
Type: BOOK - Published: 1983-04-30 - Publisher: Springer

P. Antognetti University of Genova, Italy Director of the NATO ASI The key importance of VLSI circuits is shown by the national efforts in this field taking place in several countries at differ ent levels (government agencies, private industries, defense de partments). As a result of the evolution of IC
Rapid Thermal Processing
Language: en
Pages: 430
Authors: Richard B. Fair
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-02 - Publisher: Academic Press

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology
Handbook of Semiconductor Manufacturing Technology
Language: en
Pages: 1720
Authors: Yoshio Nishi, Robert Doering
Categories: Technology & Engineering
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert